Photomask, photomask set, exposure apparatus and exposure method

ABSTRACT

An exposure apparatus may include a first moving mechanism moving by driving a first drive source a first photomask; a second moving mechanism moving by driving a second drive source a second photomask; an imaging means for imaging a first alignment mark formed on the first photomask and a substrate side mark formed on the substrate and imaging a second alignment mark formed on the first photomask and a third alignment mark formed on the second photomask; and a control unit, wherein the control unit controls the first drive source so that alignment between the first alignment mark and the substrate side mark is performed based on results of imaging these marks, and the control unit controls the second drive source so that alignment between the second alignment mark and the third alignment mark is performed based on results of imaging these marks.

CROSS REFERENCE TO RELATED APPLICATIONS

The present application is a divisional application of U.S. patentapplication No. 14/015,279, filed on Aug. 30, 2013 (presentlyco-pending), the entire contents of which are incorporated herein byreference. The Ser. No. 14/015,279 application claimed the benefit ofthe date of the earlier filed Japanese Patent Application No. JP2012-202022, filed Sep. 13, 2012, priority to which is also claimedherein, and the contents of which are also incorporated by referenceherein.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a photomask, a photomask set, anexposure apparatus, and an exposure method.

2. Description of the Related Art

Regarding flexible printed circuits (hereinafter referred to as circuitboards or substrates) used in electronic devices or the like, demandsfor densification are increasing along with miniaturization and enhancedfunctionality of electronic devices. To correspond to suchdensification, there have been attempts to densify a substrate byforming a multi-layer circuit board in which conductive layers of thesubstrate are provided on both faces or in three or more layers. As oneway of densification, a separate substrate which connects multi-layerprinted circuit boards, on which various types of electronic parts aremounted, via a connector or the like is widely used mainly in smallelectronic apparatuses such as lap-top personal computers, digitalcameras, cell phones, game machines, and the like.

Incidentally, when it is attempted to densify a substrate havingconductive layers at least on its front and rear faces, that is, havingtwo or more layers, it is important that the positional accuracy of aconductive pattern formed on each layer or each of the front and rearfaces is high. Specifically, when the positional accuracy of theconductive pattern on each layer or each of the front and rear faces ishigh, it is possible to reduce the diameters of lands of inter-layerconnection parts, and there is a merit to suppress positionaldisplacement of the conductive patterns on the front and rear faces whena target in the subsequent process is disposed only on one face. Inconnection with increasing the positional accuracy of such a conductivepattern formed on each layer or each of the front and rear faces, thereare technical ideas disclosed in Patent Documents 1 to 4.

FIG. 13 is a cross-sectional view schematically illustrating an exposuremethod of Patent Document 1. As illustrated in FIG. 13, the method ofPatent Document 1 performs alignment by reading with a CCD camera aring-shaped alignment mark added to a substrate and a circular alignmentmark added to a photomask. This method is basically able to performalignment only on one face at a time.

FIG. 14 is a cross-sectional view schematically illustrating an exposuremethod of Patent Document 2. As illustrated in FIG. 14, the method ofPatent Document 2 provides through holes in a substrate, and providesdifferent alignment marks on each of photomasks of a front side and arear side. Then, the through holes and the alignment marks of thephotomasks of the front side and the rear side are aligned, to therebyalign the substrate and the photomasks on the front side and the rearside.

Further, Patent Document 3 discloses a method using vacuum suction for awork retaining means. Moreover, Patent Document 4 discloses a workretaining means of clamping type.

[Patent Document 1] Japanese Patent No. 4921789

[Patent Document 2] Japanese Patent Application Laid-open No.2007-121425

[Patent Document 3] Japanese Patent No. 4218418

[Patent Document 4] Japanese Examined Patent Application Publication No.H5-41982

Now, in the method disclosed in Patent Document 1, when photosensitiveresists formed respectively on both front and rear faces of thesubstrate are exposed, it is necessary to align each of the front faceand the rear face of the substrate with the photomask on the front side.Consequently, positional displacement occurs two times between thering-shaped alignment mark of the substrate and the circular alignmentmark of the photomask, and thus it is difficult to improve alignmentaccuracy for the front and rear faces of the substrate.

Further, in the method disclosed in Patent Document 2, concavities andconvexities exist between a copper foil and a transparent layer (forexample, a polyimide film) of the substrate for increasing adhesiveness.Consequently, when the through holes are formed by removing the copperfoil of the substrate through rear surface processing, there is aproblem that light scatters through the concavities and convexitiesexisting on the transparent layer, and edges of the through holes andedges of the alignment marks existing on the photomasks on the rear sidebecome unclear, which decreases the alignment accuracy. Further, whenthe through holes are formed by boring the substrate through machining,there is a problem that the alignment accuracy decreases due tooccurrence of variation in processing accuracy. Moreover, through themethod disclosed in Patent Document 2, the substrate is pulled off aroll winding part to an exposure area, and the substrate is retainedwith tension at the exposure area. Consequently, there is a concern thatthe substrate can be stretched, and also it is difficult to improve thealignment accuracy because retention at the exposure area is not stable.

Note that when the work retaining means of Patent Documents 3, 4 areapplied to the methods disclosed in Patent Documents 1, 2, it isdifficult to improve the alignment accuracy between the photomasks andthe substrate.

The present invention is made based on the above-described situation,and an object thereof is to provide a photomask, a photomask set, anexposure apparatus, and an exposure method which are capable ofimproving the alignment accuracy between a substrate and respectivephotomasks disposed on the front and rear faces of the substrate.

SUMMARY OF THE INVENTION

To solve the above-described problems, according to one aspect of thepresent invention, there is provided a photomask having a drawingpattern for exposure formed on one face opposing a substrate, a firstalignment mark for alignment with a substrate side mark formed on thesubstrate, the first alignment mark being provided in a region of theone face, the region opposing the substrate when the substrate isretained and the drawing pattern is not formed in the region, and asecond alignment mark for alignment with a third alignment mark providedon another photomask, the second alignment mark being provided in aregion which does not oppose the substrate when the substrate isretained.

Further, according to another aspect of the present invention, in theabove-described invention of the photomask, preferably, a recessedportion is provided in the one face, and when negative pressure isapplied via a pressure generating means, the recessed portion appliesthe negative pressure to an opposing face of the substrate which opposesthe one face.

Furthermore, according to another aspect of the present invention, inthe above-described invention of the photomask, preferably, the recessedportion is provided with a suction trench extending along the one faceand a suction hole penetrating to the suction trench from another faceon an opposite side of the one face.

Further, according to another aspect of the present invention, in theabove-described invention of the photomask, preferably, the suctiontrench is formed in a ring shape, the first alignment mark is providedon an inside surrounded by the ring-shaped suction trench on the oneface, and the second alignment mark is provided on an outside of thering-shaped suction trench on the one face.

Further, according to a second aspect of the present invention, there isprovided a photomask set having a first photomask and a secondphotomask, wherein the first photomask has a drawing pattern forexposure formed on one face opposing a substrate, a first alignment markfor alignment with a substrate side mark formed on the substrate, thefirst alignment mark being provided in a region of the one face, theregion opposing the substrate when the substrate is retained and thedrawing pattern is not formed in the region, and a second alignment markfor alignment with a third alignment mark provided on the secondphotomask, the second alignment mark being provided in a region whichdoes not oppose the substrate when the substrate is retained, and thesecond photomask has a drawing pattern for exposure formed on one faceopposing a substrate, and a third alignment mark for alignment with thesecond alignment mark provided on the first photomask, the thirdalignment mark being provided in a region of the one face wherein theregion does not oppose the substrate when the substrate is retained.

Further, according to a third aspect of the present invention, there isprovided an exposure apparatus for exposing both faces of a substratewherein both the faces have a photosensitive material formed thereon,the exposure apparatus having a first moving mechanism having a firstdrive source and moving by driving the first drive source a firstphotomask disposed to oppose one face of the substrate at a positionwhere exposure is performed, a second moving mechanism having a seconddrive source and moving by driving the second drive source a secondphotomask disposed to oppose the one face of the substrate at a positionwhere exposure is performed, an imaging means for imaging a firstalignment mark formed on the first photomask and a substrate side markformed on the substrate and imaging a second alignment mark formed onthe first photomask and a third alignment mark formed on the secondphotomask, and a control unit for controlling driving of the first drivesource, the second drive source, and the imaging means, wherein thecontrol unit controls the first drive source so that alignment betweenthe first alignment mark and the substrate side mark is performed basedon results of imaging these marks in the imaging means, and the controlunit controls the second drive source so that alignment between thesecond alignment mark and the third alignment mark is performed based onresults of imaging these marks in the imaging means.

Further, according to a fourth aspect of the present invention, there isprovided an exposure apparatus for exposing both faces of a substratewherein both the faces have a photosensitive material formed thereon,the exposure apparatus having a first photomask having a drawing patternfor exposure formed on one face, a first alignment mark for alignmentwith a substrate side mark formed on the substrate, the first alignmentmark being provided in a region of the one face, the region opposing thesubstrate when the substrate is retained and the drawing pattern is notformed in the region, and a second alignment mark provided in a regionwhich does not oppose the substrate when the substrate is retained, afirst moving mechanism having a first drive source and moving by drivingthe first drive source the first photomask disposed to oppose one faceof the substrate at a position where exposure is performed, a secondphotomask having a drawing pattern for exposure formed on one face, athird alignment mark for alignment with the second alignment mark, thethird alignment mark being provided in a region of the one face whereinthe region does not oppose the substrate when the substrate is retained,a second moving mechanism having a second drive source and moving bydriving the second drive source the second photomask disposed to opposethe one face of the substrate at a position where exposure is performed,an imaging means for imaging the first alignment mark and a substrateside mark formed on the substrate and imaging the second alignment markand the third alignment mark, and a control unit for controlling drivingof the first drive source, the second drive source, and the imagingmeans, wherein the control unit controls the first drive source so thatalignment between the first alignment mark and the substrate side markis performed based on results of imaging these marks in the imagingmeans, and the control unit controls the second drive source so thatalignment between the second alignment mark and the third alignment markis performed based on results of imaging these marks in the imagingmeans.

Further, according to another aspect of the present invention,preferably, the above-described invention of the exposure apparatusfurther has a first pressure generating means for retaining thesubstrate by the first photomask by utilizing negative pressure orreleasing retention of the substrate by the first photomask by utilizingpositive pressure, and a second pressure generating means for retainingthe substrate by the second photomask by utilizing negative pressure orreleasing retention of the substrate by the second photomask byutilizing positive pressure, wherein the control unit controls drivingof the first pressure generating means and the second pressuregenerating means, the control unit controls driving of the firstpressure generating means so as to retain the substrate by the firstphotomask by utilizing negative pressure after alignment between thesubstrate and the first photomask is performed by controlling the firstdrive source, and the control unit controls driving of the secondpressure generating means so as to retain the substrate by the secondphotomask by utilizing negative pressure after alignment between thesubstrate and the second photomask is performed by controlling thesecond drive source.

Further, according to a fifth aspect of the present invention, there isprovided an exposure method for exposing both faces of a substratewherein both the faces have a photosensitive material formed thereon,the exposure method having a first imaging step of imaging a firstalignment mark formed on a first photomask and a substrate side markformed on the substrate and to be aligned with the first alignment mark,a first alignment step of performing alignment between the firstalignment mark and the substrate side mark at a position where exposureis performed based on results of imaging in the first imaging step, afirst position retaining step of retaining, after the first alignmentstep, an aligned state between the first photomask and the substrate atleast until the exposure of the substrate is finished, a second imagingstep of imaging, after the position retaining step, a second alignmentmark formed on the first photomask and a third alignment mark formed ona second photomask and to be aligned with the second alignment mark, asecond alignment step of performing alignment between the secondalignment mark and the third alignment mark at a position where exposureis performed based on results of imaging in the second imaging step, asecond position retaining step of retaining, after the second alignmentstep, an aligned state between the first photomask and the secondphotomask at least until the exposure of the substrate is finished, andan exposing step of exposing the substrate after the second positionretaining step.

According to the present invention, it is possible to improve alignmentaccuracy with respective photomasks disposed on the front and rear facesof a substrate.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a side cross-sectional view schematically illustrating asubstantial part of an exposure apparatus according to one embodiment ofthe present invention;

FIG. 2 is a block diagram schematically illustrating the substantialpart of the exposure apparatus of FIG. 1;

FIG. 3A is a plan view illustrating a structure of a first photomask;

FIG. 3B is a partial plan view illustrating an enlarged portion A andportion B where a suction hole is provided;

FIG. 4 is a plan view illustrating a structure of the second photomask;

FIG. 5 is a partial side cross-sectional view illustrating a structureof the photomasks;

FIG. 6A is a plan view illustrating alignment between a target mark ofthe first photomask and a substrate side mark of a substrate;

FIG. 6B is a plan view illustrating alignment between a target mark ofthe first photomask and a target mark of a second photomask;

FIG. 7 is a side cross-sectional view illustrating a state that thesubstrate is temporary fixed to the second photomask;

FIG. 8 is a side cross-sectional view illustrating an image ofperforming alignment between the first photomask and the substrate;

FIG. 9 is a side cross-sectional view illustrating a state that thesubstrate is retained by the first photomask and retention of thesubstrate by the second photomask is released;

FIG. 10 is a side cross-sectional view illustrating an image ofperforming alignment between the first photomask and the secondphotomask and a state of further retaining the substrate by the secondphotomask while the retention state of the substrate by the firstphotomask is maintained;

FIG. 11 is a side-cross-sectional view illustrating a state thatretention of the substrate by the first photomask is released while theretention state of the substrate by the second photomask is maintained;

FIG. 12 is a side cross-sectional view illustrating an image performingalignment using a substrate in which through holes are formed accordingto a modification example of the present invention;

FIG. 13 is a cross-sectional view schematically illustrating aconventional exposure method of Patent Document 1; and

FIG. 14 is a cross-sectional view schematically illustrating aconventional exposure method of Patent Document 2.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

Hereinafter, a photomask 70, a photomask set (set of photomasks 70), isan exposure apparatus 10, and an exposure method according to oneembodiment of the present invention will be described based on thedrawings. Note that when an XYZ orthogonal coordinate system is set inthe following description, in this coordinate system a verticaldirection to depart from an installation face where the exposureapparatus 10 is installed is Z direction, a transport direction of aflexible printed circuit P is X direction, and a direction orthogonal tothe X direction and the Z direction is Y direction. Further, the XYplane is a horizontal plane.

<Regarding the Flexible Printed Circuit P>

To begin with, the flexible printed circuit (substrate) P as a target ofexposure will be described. FIG. 1 is a side cross-sectional viewillustrating the structure of a substantial part of the exposureapparatus 10 and a structure of the substrate P. As illustrated in FIG.1, a photosensitive resist layer P4 (corresponding to a photosensitivematerial) is formed on each of both front and rear faces of the flexibleprinted circuit (hereinafter, one before undergoing a manufacturingprocess such as exposure is also referred to as a substrate) P on whichcircuit patterns are to be formed through various steps.

More specifically, the substrate P has a base material layer P1,conductive layers P2 provided on both front and rear faces of the basematerial layer P1, transparent film layers P3 provided on faces of theconductive layers P2, the faces being opposite to the base materiallayer P1, and photosensitive resist layers P4 provided on both faces ofthe transparent film layers P3, the faces being opposite to theconductive layers P2. The base material layer P1 is formed of apolyimide film for example, and the conductive layers P2 are formed of acopper foil for example. Further, the transparent film layers P3 areformed of a polyimide film. The thickness of such a substrate P is about100 μm to 200 μm in its entirety, which allows the substrate to be fixedflatly while preventing swelling or warping during fixation by vacuumsuction to a photomask 70, which will be described later.

Note that besides them, adhesive layers between the base material layerP1 and the conductive layers P2, through holes connecting the conductivelayers P2 to each other, and so on exist in the substrate P, butdescriptions thereof are omitted.

In FIG. 1, substrate side marks P5 are formed in the transparent filmlayer P3 on an upper side (front side). The substrate side marks P5 areparts for aligning with target marks TM1, which will be described later.In the structure illustrated in FIG. 1, each substrate side marks P5 isa ring-shaped pattern having an inside diameter larger than the diameterof a target mark TM1. There are provided two substrate side marks P5 inthe structure illustrated in FIG. 1. The positional relationship betweenthese two is such that they are at positions corresponding to the targetmarks TM1, which will be described later. Note that the length of a linelinking the two substrate side marks P5 is the same as the length of aline linking the two target marks TM1.

<Structure of the Exposure Apparatus 10>

An aligning mechanism 11 of the exposure apparatus 10 in this embodimentis for aligning both faces of the substrate P with respective photomasks70 for exposure.

FIG. 2 is a block diagram schematically illustrating the substantialpart of the exposure apparatus 10. As illustrated in FIG. 1 and FIG. 2,the aligning mechanism 11 of the exposure apparatus 10 has movingmechanisms 20. Each moving mechanism 20 moves a photomask 70 in a statethat an edge of the photomask 70 is retained. For this purpose, themoving mechanism 20 has a mask retaining unit 21 for retaining an edgeof the photomask 70, a drive source 22 (for example, a motor or thelike) for giving driving force for moving the mask retaining unit 21,and a driving force transmitting mechanism (omitted from illustration)for transmitting driving force generated in the drive source 22 to themask retaining unit 21. Thus, by actuating the drive source 22, themoving mechanism 20 is capable of moving the mask retaining unit 21 inthree directions of XYZ, and also capable of moving it in a rotationaldirection (θ direction). Here, the θ direction may be a rotationaldirection on an XY plane, a rotational direction on a YZ plane, or arotational direction on a ZX plane.

Here, as illustrated in FIG. 1, in the exposure apparatus 10 of thisembodiment, the photomasks 70 are disposed in parallel to the XY plane(horizontal plane). Such a structure has high affinities with amechanism for carrying in or out the substrate P, and the like, and iscapable of improving productivity.

However, in the exposure apparatus 10, the front faces and rear faces ofthe photomasks 70 may be arranged in parallel to the vertical direction(Z direction), or these front faces and rear faces may be arranged in anoblique direction with respect to the XY plane (horizontal plane). Whenthe front faces and rear faces of the photomasks 70 are arranged inparallel to the vertical direction (Z direction), it is possible toreduce the influence of bending of the photomasks 70 by their ownweights, or the like, and it is possible to align the photomasks 70 withthe substrate P more accurately.

As illustrated in FIG. 1, a pair of moving mechanisms 20 is provided.Specifically, there are a first moving mechanism 20A located on an upperside of the substrate P in FIG. 1, and a second moving mechanism 20Blocated on a lower side of the substrate P in FIG. 1. The first movingmechanism 20A holds the photomask 70 on the upper side of the substrateP, and aligns this photomask 70 with an upper face side of the substrateP. On the other hand, the second moving mechanism 20B holds thephotomask 70 on the lower side of the substrate P, and aligns thisphotomask 70 with a lower face side of the substrate P.

Note that the drive source for the first moving mechanism 20Acorresponds to a first drive source, and the drive source for the secondmoving mechanism 20B corresponds to a second drive source.

As illustrated in FIG. 1, the aligning mechanism 11 of the exposureapparatus 10 has an imaging device 30 corresponding to an imaging means.The imaging device 30 has cameras 31 and illuminations 32. Each camera31 has an imaging element using, for example, CCD (Charge CoupledDevice), CMOS (Complementary Metal Oxide Semiconductor), or the like,and is capable of imaging a target mark TM, which will be describedlater, and the vicinity thereof.

Further, the illuminations 32 are for irradiating light for making atarget mark TM easily identifiable when it is imaged with the camera 31,and this is irradiation of light increases a difference in gradationsbetween the target mark TM and the vicinity thereof. However, the lightemitted from the illuminations 32 gives almost no photosensitive actionto the photosensitive resist layers P4. The illuminations 32 include acoaxial epi-illumination (hereinafter referred to as epi-illumination)32A irradiating light from the upper side of the substrate P and thephotomasks 70 and a transmitted illumination 32B irradiating light fromthe lower side of the substrate P and the photomasks 70.

Note that in the structure illustrated in FIG. 1, two cameras 31 areprovided corresponding to the number of suction holes 72 of the upperphotomask 70. Further, the cameras 31 are movable in parallel to thephotomasks 70 in the structure illustrated in FIG. 1, and this movementis carried out by actuating a drive source such as a motor. However,cameras 31 may be provided at all reading positions of target marks TM,which will be described later, and the cameras 31 may be structured notto be moved by actuating a drive source such as a motor. Further, in thestructure illustrated in FIG. 1, instead of providing two cameras, onlyone camera 31 may be provided, or three or more cameras 31 may beprovided.

Note that besides the cameras 31, also the illumination 32 may bemovable by actuating a drive source such as a motor, but regardless ofwhether the cameras 31 move by actuating the drive source or not, theilluminations 32 may be disposed at the reading positions of targetmarks TM in advance.

Further, the aligning mechanism 11 of the exposure apparatus 10 isprovided with a suction/blow mechanism 40. The suction/blow mechanism 40comes in contact with the surrounding of a suction hole 72 in thephotomasks 70, which will be described later, and gives negativepressure for retaining the substrate P. This suction/blow mechanism 40includes suction pads 41, suction pipes 42, and pumps 43. The suctionpads 41 come in contact with the front face or rear face of thephotomask 70 and give negative pressure for retaining the substrate P.Further, one end of each suction pipe 42 communicates with a suction pad41 and the other end thereof is connected to a pump 43. The pumps 43apply negative pressure via the suction pipes 42 and the suction pads 41when the substrate P is retained, and this negative pressure is appliedto the substrate P via suction holes 72 of the photomasks 70. On theother hand, when the retention of the substrate P is released, the pumps43 send air (or blow or apply positive pressure) to the suction pads 41via the suction pipes 42, thereby releasing the retention of thesubstrate P.

Note that two pumps 43 are provided for example. Thus, it is possible tovacuum suck or blow on the upper photomask 70 and the lower photomask 70separately by the two pumps 43. However, a structure may be employed inwhich one pump 43 is provided and a switching valve for opening/closingthe suction pipes 42 is provided in a middle part of each suction pipe42, or the like, or a structure may be employed in which three or morepumps 43 are provided. Note that the suction/blow mechanism 40corresponds to a pressure generating means. Further, in the suction/blowmechanism 40, a part vacuum sucking or blowing on the upper photomask 70corresponds to a first pressure generating means, and a part vacuumsucking or blowing on the lower photomask 70 corresponds to a secondpressure generating means.

Further, as illustrated in FIG. 2, the exposure apparatus 10 has anillumination device 50 for exposure besides the aligning mechanism 11.The illumination device 50 for exposure has a light source such as ahigh-pressure mercury light for example (omitted from illustration), andlight from this light source is irradiated to the photosensitive resistlayers P4 of the substrate P. Note that the illumination device 50 forexposure has, besides the light source, optical elements such as a lens,a mirror, a fly-eye, and so on (omitted from illustration) forirradiating light with a high degree of parallelism to the photomasks70.

Note that a structure may be employed in which the illumination device50 for exposure is provided on each of the upper side and the lowerside. In this case, it is possible to expose the front side and rearside of the substrate P simultaneously. On the other hand, for example,a structure may be employed which is provided with an illuminationdevice 50 for exposure performing illumination of either of the upperside and lower side. When the illumination device 50 for exposureperforming illumination of either of the is upper side and lower side isprovided, it may be structured to have an optical system for guidinglight to the upper side of the substrate P and an optical system forguiding light to the lower side of the substrate P, and switch which ofthe upper side and lower side of the substrate P the light is guided toby a shutter or the like. When the illumination device 50 for exposureperforming illumination of either of the upper side and lower side isprovided thus, as compared to the structure in which the exposureillumination devices 50 are provided on the upper side and lower siderespectively, productivity is low but costs for the illumination device50 for exposure are low, and size reduction of the exposure apparatus 10is possible. It is also possible to suppress power consumption.

As illustrated in FIG. 2, the aligning mechanism 11 of the exposureapparatus 10 is provided with a control unit 60. The control unit 60controls actuation of the drive sources 22, the cameras 31, the pumps43, and so on. Note that the control unit 60 may control actuation ofthe illuminations 32 and actuation of not illustrated valves besidesthem.

<Regarding the Photomasks 70>

Next, the photomasks 70 will be described. FIGS. 3A and 3B are planviews illustrating a structure of the upper photomask 70 (firstphotomask 70A which will be described later). FIG. 3A is a plan viewillustrating an entire photomask 70, and FIG. 3B is a partial plan viewillustrating an enlarged portion A and portion B as corner portions ofthe photomask 70 of FIG. 3A. Further, FIG. 4 is a plan view illustratinga structure of the lower photomask 70 (second photomask 70B which willbe described later). Note that a portion A and a portion B in FIG. 4 aresimilar to those in FIG. 3B. Further, FIG. 5 is a cross-sectional viewillustrating a structure of the photomasks 70.

A photomask 70 in this embodiment is a glass mask made of glass, whichhas a small dimensional variation and is able to correspond to highaccuracy. However, the photomask 70 may be formed of material other thanglass such as a PET film for example. Further, as illustrated in FIG. 3Aand FIG. 4, the photomask 70 of this embodiment is provided in arectangular shape. However, the photomask 70 may have a shape other thanthe rectangular shape.

Note that when the photomask 70 is a glass mask, its thickness ispreferred to be about 3 mm to 10 mm, more preferably about 5 mm.

A suction trench 71 is provided in one face of the photomask 70. Thesuction trench 71 is provided at a position shifted more toward the sideof an outer peripheral edge 70 c than the center side thereof in thephotomask 70. Describing more specifically, the suction trench 71 isprovided at a position located as follows with respect to the outerperipheral edge 70 c. That is, on the outer peripheral edge 70 c side ofthe photomask 70, there is a retained portion to be retained by the maskretaining unit 21. Further, there is a predetermined space from theretained portion toward the center side, and this space is for formingthe target marks TM, which will be described later. Accordingly, thesuction trench 71 exists at a position separating the retained portionand a target forming portion with respect to the outer peripheral edge70 c. Further, as illustrated in FIG. 3A and FIG. 4, in this embodiment,the suction trench 71 is formed in a square ring shape.

Note that in a portion surrounded by the suction trench 71 in thephotomask 70, a drawing pattern 73 for exposure of the photosensitiveresist layers P4 of the substrate P is formed.

Further, as illustrated in FIG. 3A to FIG. 5, at a predetermined portionof the suction trench 71, a suction hole 72 is provided to penetrate thephotomask 70 from a bottom portion of the suction trench 71 to the otherface. In this embodiment, as illustrated in FIGS. 3A and 3B and FIG. 4,the suction hole 72 is provided at a corner portion of the suctiontrench 71 having a square ring shape (portion A and portion B of FIG. 3Aand FIG. 4). However, the suction hole 72 may be provided at a portionother than the corner portion. Further, at least one suction hole 72 isprovided.

Note that the diameter of the suction hole 72 is preferred to be about 1mm to 2 mm, but the diameter of the suction hole 72 may be any diameterout of this range. Further, the width of the suction trench 71 ispreferably about 1 mm to 4 mm, more preferably about 2 mm, but the widthof the suction trench 71 may be any width out of this range. Further,the suction trench 71 and the is suction hole 72 correspond to arecessed portion.

As illustrated in FIG. 1, FIG. 3A and FIG. 4, the photomask 70 isprovided with target marks TM. Among the target marks TM, ones for theupper photomask 70 (hereinafter referred to as a first photomask 70A asnecessary) and ones for the lower photomask 70 (hereinafter referred toas a second photomask 70B as necessary) are different.

Specifically, on the inside surrounded by the ring-shaped suction trench71 on the first photomask 70A, target marks TM1 are provided foraligning with the substrate side marks P5 of the substrate P. The targetmarks TM1 correspond to a first alignment mark Note that FIG. 6Aillustrates alignment between a target mark TM1 and a substrate sidemark P5. As illustrated in FIG. 6A, the target marks TM 1 are providedto have a circular shape so as to correspond to the substrate side marksP5, and are also non-light-transmissive portions through which it isdifficult to transmit light. Note that such target marks TM1 may beformed of the same material as the drawing pattern 73, such as a chromefilm or a blackened metal silver film for example.

Further, as illustrated in FIG. 1 and FIG. 3A, in this embodiment, twotarget marks TM 1 are provided in the first photomask 70A. Thepositional relationship of these two is such that they are shiftedtoward (close to) two corner portions (corner portions other than theportion A and portion B) located in a diagonal direction among the fourcorners of the ring-shaped suction trench 71 in the photomaskillustrated in FIG. 3A. However, as illustrated in FIG. 3A, when shortsides of the rectangular photomask 70 are along the X direction and longsides thereof are along the Y direction, the line linking two targetmarks TM1 may be in parallel to the X direction or to the Y direction.Further, the line linking two target marks TM 1 need not be in parallelto either of the X direction and the Y direction.

Further, on the outside of the ring-shaped suction trench 71 on thefirst photomask 70A, target marks TM2 are provided for aligning with thesecond photomask 70B. The target marks TM2 correspond to a secondalignment mark. In the structure illustrated in FIG. 3A, the targetmarks TM2 are circular non-light-transmissive portions similarly to theabove-described target marks TM1.

Further, there are provided two target marks TM2 on the first photomask70A, similarly to the above-described target marks TM 1. The positionalrelationship of these two target marks TM2 is also similar to that ofthe above-described target marks TM1. However, among the four cornerportions of the ring-shaped suction trench 71, the target marks TM2 maybe close to the corner portions to which the target marks TM1 are close,but the target marks TM2 may also be close to corner portions differentfrom them.

Further, as illustrated in FIG. 4, also the second photomask 70B isprovided with target marks TM3. These target marks TM3 are for aligningwith the target marks TM2 of the first photomask 70A. Specifically, thetarget marks TM3 are provided on the outside of the ring-shaped suctiontrench 71 in the second photomask 70B. Moreover, when the secondphotomask 70B is seen in a plan view, the target marks TM3 are providedat positions where their centers can be overlaid on the centers of thetarget marks TM2. Note that the target marks TM3 correspond to a thirdalignment mark.

To be at such positions, the target marks TM3 are provided closely atthe same corner portions to which the target marks TM2 are close (cornerportions other than the portion A and portion B) among the four cornerportions of the ring-shaped suction trench 71. Further, the length of aline linking two target marks TM3 is the same as the length of a linelinking the two target marks TM2.

Note that FIG. 6B illustrates alignment between a target mark TM2 and atarget mark TM3. In this embodiment, as illustrated in FIG. 4 and FIG.6B, the target mark TM3 is provided to have a circular ring shape. Theinside diameter of the target mark TM3 having a circular ring shape isset larger than the diameter of the target mark TM2. Further, a portionsurrounded by the target mark TM3 having a circular ring shape is alight-transmissive portion where a coating film for forming this targetmark TM3 is not formed.

<Regarding an Exposure Method Using the Exposure Apparatus 10>

Next, an exposure method using the above-described exposure apparatus 10will be described.

First, as illustrated in FIG. 7, the substrate P on which thephotosensitive resist layers P4 are formed is placed on the lower secondphotomask 70B. Then, based on the control by the control unit 60, thesuction/blow mechanism 40 gives negative pressure to the rear face(lower face) of the substrate P via the suction holes 72 and thering-shaped suction trench 71, so as to vacuum suck the substrate P. Thesubstrate P is thus sucked and fixed onto the second photomask 70B. Thefixation of the substrate P at this time is, so to speak, a temporaryfixation by which alignment with the second photomask 70B is notperformed.

Next, as illustrated in FIG. 8, the control unit 60 performs controlsuch that the positional relationship between the first photomask 70Aand the substrate P is imaged with the cameras 31 (first imaging step),and the drive source 22 is actuated based on results of the imaging withthe cameras 31 to adjust the position of the first photomask 70A in theXYZ directions and the position thereof in the θ direction (firstalignment step). At this time, also the epi-illumination 32A isilluminated, creating a state that enables good image recognition withthe cameras 31. Note that when the position in the Z direction is at adesired position in advance, the position adjustment in the Z directionmay be omitted. At this time, through the cameras 31, the alignment isperformed until the target marks TM 1 and the substrate side marks P5 ofthe substrate P are at desired positions.

Here, at the stage before performing the alignment, although roughalignment is performed between the first photomask 70A and the substrateP, the accuracy thereof is not good. Accordingly, as illustrated in FIG.6A, the first photomask 70A is moved via the first moving mechanism 20Aso that the centers of the target marks TM1 fall within a predeterminederror range with respect to the centers of the substrate side marks P5,thereby performing alignment between the first photomask 70A and thesubstrate P.

Note that in such alignment, the first photomask 70A and the substrate Pis brought to a state that a predetermined gap (for example, a gap ofabout 10 μm to 100 μm) exists therebetween, and in this state the firstphotomask 70A is moved via the first moving mechanism 20A. Then, afterthe alignment between the first photomask 70A and the substrate P isperformed, the first photomask 70A is brought into contact with thesubstrate P, and the state of the alignment between the target marks TM1and the substrate side marks P5 is checked via the cameras 31.

When it is judged through this check that the centers of the targetmarks TM1 do not fall within the predetermined error range with respectto the centers of the substrate side marks P5, the gap between the firstphotomask 70A and the substrate P is made again, the position of thefirst photomask 70A relative to the substrate P is adjusted again,thereafter the first photomask 70A is brought into contact with thesubstrate P, and whether or not the centers of the target marks TM1 fallwithin the predetermined error range with respect to the centers of thesubstrate side marks P5 is checked again. Then, such operation isrepeated until the centers of the target marks TM1 fall within thepredetermined error range with respect to the centers of the substrateside marks P5.

When the centers of the target marks TM1 fall within the predeterminederror range with respect to the centers of the substrate side marks P5,subsequently the substrate P is retained by the first photomask 70A asillustrated in FIG. 9 (first position retaining step), and retention ofthe substrate P by the second photomask 70B is released. That is, thesubstrate P is handed over to the first photomask 70A. At this time, thecontrol unit 60 performs control such that the pump 43 for the upperside performs a suction operation, negative pressure is given to theportion surrounded by the substrate P and the suction trench 71 via thesuction pipes 42 directed toward the first photomask 70A, and thesuction holes 72 and the suction trench 71 of the first photomask 70A,thereby retaining the substrate P by the first photomask 70A. On theother hand, the control unit 60 performs control such that the pump 43for the lower side performs a blow operation to send air to the portionsurrounded by the substrate P and the suction trench 71 via the suctionpipes 42 directed toward the second photomask 70B, and the suction holes72 and the suction trench 71 of the second photomask 70B, therebyreleasing the retention state of the substrate P by the second photomask70B.

In this case, until handing over of the substrate P to the firstphotomask 70A finishes, the state of the position adjustment between thecenters of the target marks TM1 and the centers of the substrate sidemarks P5 is maintained. Thus, the positional accuracy between the firstphotomask 70A and the substrate P is maintained.

Next, as illustrated in FIG. 10, the control unit 60 performs controlsuch that the positional relationship between the first photomask 70Aand the second photomask 70B is imaged with the cameras 31 (secondimaging step), and the drive source 22 is actuated based on results ofthe imaging with the cameras 31 to adjust the position of the secondphotomask 70B in the XYZ directions and the position thereof in the θdirection (second alignment step). At this time, also the transmittedillumination 32B is illuminated, creating a state that enables goodimage recognition with the cameras 31. Note that when the position inthe Z direction is at a desired position in advance, the positionadjustment in the Z direction may be omitted. At this time, through thecameras 31, the alignment is performed until the target marks TM2 andthe target marks TM3 are at desired positions.

At this time, as illustrated in FIG. 6B, the second photomask 70B ismoved via the second moving mechanism 20B so that the centers of thetarget marks TM2 fall within a predetermined error range with respect tothe centers of the target marks TM3, thereby performing alignmentbetween the first photomask 70A and the second photomask 70B.

Note that in such alignment, the second photomask 70B and the substrateP is brought to a state that a predetermined gap (for example, a gap ofabout 10 μm to 100 μm) exists therebetween, and in this state the secondphotomask 70B is moved via the second moving mechanism 20B. Then, afterthe alignment between the first photomask 70A and the second photomask70B is performed, the second photomask 70B is brought into contact withthe substrate P, and the state of the alignment between the target marksTM2 and the target marks TM3 is checked via the cameras 31.

When it is judged through this check that the centers of the targetmarks TM2 do not fall within the predetermined error range with respectto the centers of the target marks TM3, the gap between the secondphotomask 70B and the substrate P is made again, the position of thesecond photomask 70B is adjusted again, thereafter the second photomask70B is brought into contact with the substrate P, and whether or not thecenters of the target marks TM2 fall within the predetermined errorrange with respect to the centers of the target marks TM3 is checkedagain. Then, such operation is repeated until the centers of the targetmarks TM2 fall within the predetermined error range with respect to thecenters of the target marks TM3.

When the centers of the target marks TM2 fall within the predeterminederror range with respect to the centers of the target marks TM3,subsequently the substrate P is further retained by the second photomask70B while the retention state of the substrate P by the first photomask70A is maintained (second position retaining step). The state at thistime is illustrated in FIG. 10. In this case, the control unit 60performs control such that the pump 43 for the lower side performs asuction operation, negative pressure is given to the portion surroundedby the substrate P and the suction trench 71 via the suction pipes 42directed toward the second photomask 70B, and the suction holes 72 andthe suction trench 71 of the second photomask 70B, thereby retaining thesubstrate P by the second photomask 70B.

As described above, after a state that the first photomask 70A and thesecond photomask 70B both retain the substrate P is created, theillumination device 50 for exposure is actuated to expose both faces ofthe substrate P (exposing step).

Subsequently, as illustrated in FIG. 11, while the retention state ofthe substrate P by the second photomask 70B is maintained, the retentionof the substrate P by the first photomask 70A is released. That is, thesubstrate P is handed over to the second photomask 70B. At this time,while maintaining the suction operation of the pump 43 for the lowerside, the control unit 60 performs control such that the pump 43 for theupper side performs a blow operation to send air to the portionsurrounded by the substrate P and the suction trench 71 via the suctionpipes 42 directed toward the first photomask 70A, and the suction holes72 and the suction trench 71 of the first photomask 70A, therebyreleasing the retention state of the substrate P by the first photomask70A.

Thereafter, the control unit 60 performs control such that the pump 43for the lower side performs a blow operation to send air to the portionsurrounded by the substrate P and the suction trench 71 via the suctionpipes 42 directed toward the second photomask 70B, and the suction holes72 and the suction trench 71 of the second photomask 70B, therebyreleasing the retention state of the substrate P by the second photomask70B. Thus, even when the second photomask 70B and the substrate P adhereto each other due to static electricity for example, removal of thesubstrate P becomes easy, and productivity improves. Note that regardingthis removal, the second photomask 70B may be moved to a removal pointof the substrate P by actuating the second moving mechanism 20B, andthen the substrate P may be removed from the exposure apparatus 10.

Note that in order to further reduce the influence of adhesion of thesecond photomask 70B and the substrate P due to static electricity, aircharged via an ionizer may be supplied to the second photomask 70B fromthe pump 43 for the lower side.

<Effects>

With the photomasks, the exposure apparatus 10, and the exposure methodstructured as above, it is possible to perform alignment between thefirst photomask 70A and the substrate P by performing alignment betweenthe target marks TM1 and the substrate side marks P5. In addition, it ispossible to perform alignment between the first photomask 70A and thesecond photomask 70B by performing alignment between the target marksTM2 and the target marks TM3. Thus, it is possible to perform alignmentbetween the first photomask 70A and the substrate P as well as thesecond photomask 70B and the substrate P (alignment of both faces of thesubstrate P).

In this case, based on the control by the control unit 60, whileperforming imaging with the cameras 31, the moving mechanisms 20 areactuated to perform alignment between the target marks TM1 and the issubstrate side marks P5 and further alignment between the target marksTM2 and the target marks TM3, thereby enabling highly accurate alignmentbetween the first photomask 70A and the substrate P as well as thesecond photomask 70B and the substrate P.

Further, in this embodiment, the photomasks 70 are provided with thesuction trench 71 and the suction holes 72 for applying negativepressure to the portion surrounded by the substrate P and the suctiontrench 71 when it is brought into contact with the substrate P. Byapplying negative pressure through them as described above when thephotomasks 70 are brought into contact with the substrate P, thesubstrate P can be retained favorably by the photomasks 70. Then, whenthe substrate P is retained by the photomasks 70 after alignment betweenthe photomasks 70 and the substrate P is performed, it is possible toprevent positional displacement after the alignment, thereby enablingexposure with high positional accuracy.

In this case, by applying negative pressure to the substrate P based onthe control of the pumps 43 by the control unit 60, exposure with highpositional accuracy as described above is possible. Further, by applyingpositive pressure to the substrate P after alignment based on thecontrol by the control unit 60, removal of the substrate P is easy evenwhen the photomasks 70 and the substrate P adhere to each other due tostatic electricity for example, and it is thereby possible to improveproductivity.

Note that by providing the photomasks 70 with the suction trench 71 andthe suction holes 72 as a recessed portion for sucking and retaining thesubstrate P, it is possible to favorably retain the substrate P by thephotomasks 70.

Further, in this embodiment, in the first photomask 70A, the suctiontrench 71 is provided in a ring shape, and the target marks TM1 areprovided on the inside surrounded by the ring-shaped suction trench 71.Thus, it is possible to perform alignment of the target marks TM1 whilethey are positioned to oppose the substrate side marks P5 of thesubstrate P. On the other hand, the target marks TM2 are provided on theoutside of the ring-shaped suction trench 71. Thus, it is possible toperform alignment of the is target marks TM2 while they are positionedto oppose the target marks TM3 of the second photomask 70B without beingblocked by the substrate P.

Further, in this embodiment, the set of the first photomask 70A and thesecond photomask 70B is used, and the target marks TM different fromeach other are formed in these photomasks 70A, 70B. They make itpossible to perform not only alignment between the first photomask 70Aand the substrate P, but also alignment between the first photomask 70Aand the second photomask 70B. Thus, it is possible to favorably alignthe photomasks 70A, 70B with both faces of the substrate P.

Moreover, in this embodiment, when the first photomask 70A and thesecond photomask 70B are set in the exposure apparatus 10, it ispossible to perform alignment between the first photomask 70A and thesubstrate P as well as alignment between the first photomask 70A and thesecond photomask 70B based on the control by the control unit 60. Thus,it is possible to perform alignment between them easily with highaccuracy.

Further, in this embodiment, the control unit 60 controls driving of thepump 43 for the upper side to utilize negative pressure to retain thesubstrate P by the first photomask 70A after alignment between thesubstrate P and the first photomask 70A is performed by controlling thedrive source 22. Thus, it is possible to favorably maintain a state thatalignment is performed between the first photomask 70A and the substrateP. Moreover, the control unit controls driving of the pump 43 for thelower side to utilize negative pressure to retain the substrate P by thesecond photomask 70B after alignment between the first photomask 70A andthe second photomask 70B is performed by controlling the drive source22. Thus, it is possible to favorably maintain a state that alignment isperformed between the second photomask 70B and the substrate P.

Modification Examples

In the foregoing, one embodiment of the present invention has beendescribed, but the present invention can be modified in various otherways. Such modifications will be described below.

In the above-described embodiment, the substrate P is provided with thesubstrate side marks P5 formed of a ring-shaped pattern. However, othersubstrate side marks may be provided on the substrate P instead of suchsubstrate side marks P5 formed of a ring-shaped pattern. As suchsubstrate side marks, for example, through holes P6 may be formed in thesubstrate P as illustrated in FIG. 12, and these through holes P6 may beused as the substrate side marks. Also in this manner, it is possible tofavorably perform alignment between the target marks TM1 of the firstphotomask 70A and the through holes P6. Note that when alignment betweenthe target marks TM1 and the through holes P6 is performed, use of theepi-illumination 32A makes recognition performance with the cameras 31favorable.

Further, in the above-described embodiment, the substrate P is of singleprocessing type which is cut off in a sheet form. However, the substrateis not limited to the single processing type, and may be one which ispulled off a roll winding part. In this case, a mechanism to supply thesubstrate from the roll winding part to the exposure area and amechanism to roll up the substrate after exposure can be provided. Inother words, it becomes possible to correspond to a roll-to-rollprocess.

Moreover, in the above-described embodiment, as the illuminations 32,the epi-illumination 32A and the transmitted illumination 32B areexplained. As the illuminations, however, any illumination such as aring illumination may be used as long as it allows favorable recognitionof the target marks TM, the substrate side marks P5, and so on, givesalmost no sensitivity to the photosensitive resist layers P4, and haslight in a wavelength range which can be recognized favorably with thecameras 31. As such illumination, for example, various types of LED(Light Emitting Diodes), infrared light source, and the like may be usedsolely or in various combinations.

Further, in the above-described embodiment, alignment of the secondphotomask 70B with the first photomask 70A is performed by driving thedrive source 22 of the second moving mechanism 20B. However, suchalignment of the second photomask 70B with the first photomask 70A maybe performed by driving the drive source 22 of the first movingmechanism 20A. Note that driving of the drive source 22 of the secondmoving mechanism 20B and driving of the drive source 22 of the firstmoving mechanism 20A may be combined for performing alignment of thesecond photomask 70B with the first photomask 70A.

Further, in the above-described embodiment, the exposure apparatus 10,the photomasks 70, the photomask set, and the exposure method are usedfor alignment and exposure of the flexible printed circuit P. However,the present invention can be applied to alignment and exposure of otherthan the flexible printed circuit P. Examples of such an alternative tothe substrate P include a semiconductor substrate, a glass substrate,and the like.

Further, in the above-described embodiment, the ring-shaped suctiontrench 71 and the suction holes 72 are explained as a recessed portion.However, the recessed portion is not limited to the suction trench 71and the suction holes 72, and may be any one. For example, a suctiontrench which is not ring-shaped but is cut in the middle may be used, ora depression is formed in one face of the photomask 70 and thisdepression may be used as the recessed portion. Note that when the areaof the depression is large, a separate member for supporting thesubstrate P may be disposed in this depression. Further, the number ofsuction trenches 71 may be any number as long as there is at least one.The number of suction holes 72 may also be any number as long as thereis at least one. Furthermore, for the suction trench 71, any one ofvarious forms, such as a curved form, a zigzag form, and the like, canbe employed, other than the straight form.

Further, in the above-described embodiment, the substrate P has twoconductive layers P2. However, the substrate P may be structured to havethree or more conductive layers P2. When it has such three or moreconductive layers P2, the number of photomasks 70 is increasedaccordingly, and exposure of the substrate P can be carried out byreplacing the photomasks 70 sequentially, or carrying the substrate P toa different position, or by another similar way.

What is claimed is:
 1. An exposure apparatus for exposing both faces ofa substrate wherein both the faces have a photosensitive material formedthereon, the exposure apparatus comprising: a first moving mechanismcomprising a first drive source and moving by driving the first drivesource a first photomask disposed to oppose one face of the substrate ata position where exposure is performed; a second moving mechanismcomprising a second drive source and moving by driving the second drivesource a second photomask disposed to oppose other face of the substrateat a position where exposure is performed; an imaging means for imaginga first alignment mark formed on the first photomask and a substrateside mark formed on the substrate and imaging a second alignment markformed on the first photomask and a third alignment mark formed on thesecond photomask; a first pressure generating means for retaining thesubstrate by the first photomask by utilizing negative pressure orreleasing retention of the substrate by the first photomask by utilizingpositive pressure; a second pressure generating means for retaining thesubstrate by the second photomask by utilizing negative pressure orreleasing retention of the substrate by the second photomask byutilizing positive pressure; and a control unit for controlling drivingof the first drive source, the second drive source, the imaging means,the first pressure generating means and the second pressure generatingmeans, wherein the control unit controls the first drive source so thatalignment between the first alignment mark and the substrate side markis performed based on results of imaging these marks in the imagingmeans, the control unit controls driving of the first pressuregenerating means so as to retain the substrate by the first photomask byutilizing negative pressure after alignment between the substrate andthe first photomask is performed by controlling the first drive source,the control unit controls the second drive source so that alignmentbetween the second alignment mark and the third alignment mark isperformed based on results of imaging these marks in the imaging means,and the control unit controls driving of the second pressure generatingmeans so as to retain the substrate by the second photomask by utilizingnegative pressure after alignment between the substrate and the secondphotomask is performed by controlling the second drive source.
 2. Anexposure apparatus for exposing both faces of a substrate wherein boththe faces have a photosensitive material formed thereon, the exposureapparatus comprising: a first photomask comprising a drawing pattern forexposure formed on one face, a first alignment mark for alignment with asubstrate side mark formed on the substrate, the first alignment markbeing provided in a region of the one face, the region opposing thesubstrate when the substrate is retained and the drawing pattern is notformed in the region, and a second alignment mark provided in a regionwhich does not oppose the substrate when the substrate is retained; afirst moving mechanism comprising a first drive source and moving bydriving the first drive source the first photomask disposed to opposeone face of the substrate at a position where exposure is performed; asecond photomask comprising a drawing pattern for exposure formed on oneface, a third alignment mark for alignment with the second alignmentmark, the third alignment mark being provided in a region of the oneface wherein the region does not oppose the substrate when the substrateis retained; a second moving mechanism comprising a second drive sourceand moving by driving the second drive source the second photomaskdisposed to oppose other face of the substrate at a position whereexposure is performed; an imaging means for imaging the first alignmentmark and a substrate side mark formed on the substrate and imaging thesecond alignment mark and the third alignment mark; a first pressuregenerating means for retaining the substrate by the first photomask byutilizing negative pressure or releasing retention of the substrate bythe first photomask by utilizing positive pressure; a second pressuregenerating means for retaining the substrate by the second photomask byutilizing negative pressure or releasing retention of the substrate bythe second photomask by utilizing positive pressure; and a control unitfor controlling driving of the first drive source, the second drivesource, the imaging means, the first pressure generating means and thesecond pressure generating means, wherein the control unit controls thefirst drive source so that alignment between the first alignment markand the substrate side mark is performed based on results of imagingthese marks in the imaging means, the control unit controls driving ofthe first pressure generating means so as to retain the substrate by thefirst photomask by utilizing negative pressure after alignment betweenthe substrate and the first photomask is performed by controlling thefirst drive source, the control unit controls the second drive source sothat alignment between the second alignment mark and the third alignmentmark is performed based on results of imaging these marks in the imagingmeans, and the control unit controls driving of the second pressuregenerating means so as to retain the substrate by the second photomaskby utilizing negative pressure after alignment between the substrate andthe second photomask is performed by controlling the second drivesource.